J.-Ch Barbé, S. Barraud, O. Rozeau, S. Martinie, J. Lacord, et al.. Stacked Nanowires/Nanosheets GAA MOSFET From Technology to Design Enablement.
2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Sep 2017, Kamakura, Japan.
⟨10.23919/SISPAD.2017.8085250⟩.
⟨cea-01973405⟩