Correlation of electrical characteristics with interface chemistry and structure in Pt/Ru/PbZr$_{0.52}$ Ti$_{0.48}$O$_3$/Pt capacitors after post metallization annealing

Ibrahima Gueye (1) , Gwenael Le Rhun (1) , Olivier Renault (1) , David Cooper (1) , Emmanuel Defay (2) , Nicholas Barrett (3)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 LIST - Luxembourg Institute of Science and Technology
3 LENSIS - Laboratoire d'Etude des NanoStructures et Imagerie de Surface

We report the effect of post-metallization annealing (PMA) on the electrical behavior of Pt/Ru/PbZr$_{0.52}$ Ti$_{0.48}$O$_3$(PZT)/Pt capacitors and correlations with the physical chemistry of the top electrode/PZT interface. PMA improves the electrical characteristics, in particular the breakdown field while inducing important chemical and structural modifications at the interface. The Ru electrode layer is oxidized and disrupted. There is evidence for the formation of RuO$_x$ and ZrRuO$_x$ metallic phases at the interface but no Pb transport into the electrode region is observed.

Domaines: Physique [physics]

Ibrahima Gueye, Gwenael Le Rhun, Olivier Renault, David Cooper, Emmanuel Defay, et al.. Correlation of electrical characteristics with interface chemistry and structure in Pt/Ru/PbZr$_{0.52}$ Ti$_{0.48}$O$_3$/Pt capacitors after post metallization annealing. Applied Physics Letters, 2018, 113, pp.132901. ⟨10.1063/1.5041767⟩. ⟨cea-01935332⟩