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Journal articles
Correlation of electrical characteristics with interface chemistry and structure in Pt/Ru/PbZr$_{0.52}$ Ti$_{0.48}$O$_3$/Pt capacitors after post metallization annealing
Abstract : We report the effect of post-metallization annealing (PMA) on the electrical behavior of Pt/Ru/PbZr$_{0.52}$ Ti$_{0.48}$O$_3$(PZT)/Pt capacitors and correlations with the physical chemistry of the top electrode/PZT
interface. PMA improves the electrical characteristics, in particular the breakdown field
while inducing important chemical and structural modifications at the interface. The Ru electrode
layer is oxidized and disrupted. There is evidence for the formation of RuO$_x$ and ZrRuO$_x$ metallic
phases at the interface but no Pb transport into the electrode region is observed.
https://hal-cea.archives-ouvertes.fr/cea-01935332
Contributor : Dominique Girard <>
Submitted on : Monday, November 26, 2018 - 3:59:58 PM
Last modification on : Friday, March 5, 2021 - 3:03:41 PM
Contributor : Dominique Girard <>
Submitted on : Monday, November 26, 2018 - 3:59:58 PM
Last modification on : Friday, March 5, 2021 - 3:03:41 PM