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Conference papers
Frequency profile measurement system for microcantilever-array based gas sensor
Abstract : This paper presents an autonomous instrument based on an array of 8 MEMS micro cantilevers for gas sensor application. The main contribution of this system to the MEMS domain lies on the way the micro cantilevers are optimally exposed to a constant gas flow in a gas cell where the electrical connections to the sensors are done without any wire-bonding. Sensors can therefore be easily changed for another application or for maintenance. Moreover, this complete and autonomous system is able to extract in real time (1 reading/sec) the frequency response of all the MEMS cantilevers by using an innovative mixed-signal processing circuit featuring self-diagnostic and automatic-calibration. Other novelties are the simultaneous piezo-electric excitation of the sensor-array, a low-noise polarization circuit and the detection circuit optimized for piezo-resistive micro cantilevers. From a system point of view this instrument provides the ability to monitor the frequency profiles of an array of resonant gas sensors.
Keywords :
frequency profile measurement system
piezoresistive microcantilever
microcantilever
frequency profile
mixed-signal processing circuit
measurement system
maintenance
wire-bonding
constant gas flow
MEMS microcantilever
microcantilever-array based resonant gas sensor
gas sensor
Gas detectors
Computer architecture
Microprocessors
microsensors
piezoelectric transducers
detection circuit
low-noise polarization circuit
piezoelectric excitation
automatic-calibration
Optical variables measurement
Resonant frequency
Frequency measurement
piezoresistive devices
sensor arrays
calibration
cantilevers
detector circuits
piezoelectricity
https://hal-cea.archives-ouvertes.fr/cea-01912721
Contributor : Marie-France Robbe Connect in order to contact the contributor
Submitted on : Monday, November 5, 2018 - 4:01:41 PM
Last modification on : Friday, August 5, 2022 - 2:54:00 PM
Contributor : Marie-France Robbe Connect in order to contact the contributor
Submitted on : Monday, November 5, 2018 - 4:01:41 PM
Last modification on : Friday, August 5, 2022 - 2:54:00 PM