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Frequency profile measurement system for microcantilever-array based gas sensor

Abstract : This paper presents an autonomous instrument based on an array of 8 MEMS micro cantilevers for gas sensor application. The main contribution of this system to the MEMS domain lies on the way the micro cantilevers are optimally exposed to a constant gas flow in a gas cell where the electrical connections to the sensors are done without any wire-bonding. Sensors can therefore be easily changed for another application or for maintenance. Moreover, this complete and autonomous system is able to extract in real time (1 reading/sec) the frequency response of all the MEMS cantilevers by using an innovative mixed-signal processing circuit featuring self-diagnostic and automatic-calibration. Other novelties are the simultaneous piezo-electric excitation of the sensor-array, a low-noise polarization circuit and the detection circuit optimized for piezo-resistive micro cantilevers. From a system point of view this instrument provides the ability to monitor the frequency profiles of an array of resonant gas sensors.
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https://hal-cea.archives-ouvertes.fr/cea-01912721
Contributor : Marie-France Robbe <>
Submitted on : Monday, November 5, 2018 - 4:01:41 PM
Last modification on : Tuesday, June 2, 2020 - 7:36:04 AM

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Maira Possas, Lionel Rousseau, Farbod Ghassemi, Gaelle Lissorgues, Emmanuel Scorsone, et al.. Frequency profile measurement system for microcantilever-array based gas sensor. 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Apr 2015, Montpellier, France. pp.7160999, ⟨10.1109/DTIP.2015.7160999⟩. ⟨cea-01912721⟩

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