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Journal Articles Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Year : 2016

Strain relaxation of CdTe on Ge studied by medium energy ion scattering

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Abstract

We have used the medium energy ion scattering (MEIS) technique to assess the strain relaxation in molecular-beam epitaxial (MBE) grown CdTe (211)/Ge (211) system. A previous X-ray diffraction study, on 10 samples of the same heterostructure having thicknesses ranging from 25 nm to 10 mu m has allowed the measurement of the strain relaxation on a large scale. However, the X-ray diffraction measurements cannot achieve a stress measurement in close proximity to the CdTe/Ge interface at the nanometer scale. Due to the huge lattice misfit between the CdTe and Ge, a high degree of disorder is expected at the interface. The MEIS in channeling mode is a good alternative in order to profile defects with a high depth resolution. For a 21 nm thick CdTe layer, we observed, at the interface, a high density of Cd and/or Te atoms moved from their expected crystallographic positions followed by a rapid recombination of defects. Strain relaxation mechanisms in the vicinity of the interface are discussed (C) 2016 Elsevier B.V. All rights reserved.
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cea-01851571 , version 1 (30-07-2018)

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Jean-Christophe Pillet, Fabrice Pierre, Denis Jalabert. Strain relaxation of CdTe on Ge studied by medium energy ion scattering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2016, 384, pp.1-5. ⟨10.1016/j.nimb.2016.07.020⟩. ⟨cea-01851571⟩
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