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Heteroepitaxial diamond on iridium: New insights on domain formation

N. Vaissiere 1 S. Saada 1 M. Bouttemy 2 A. Etcheberry 2 P. Bergonzo 1 Jean-Charles Arnault 1
1 LCD-LIST - Laboratoire Capteurs Diamant
DM2I - Département Métrologie Instrumentation & Information : DRT/LIST/DM2I
Abstract : Topography and chemical evolutions of the iridium surface in the successive steps of bias-enhanced nucleation and growth were investigated using scanning electron microscopy (SEM), atomic force microscopy (AFM), and nano-Auger analyses. This sequential approach, which was performed in localized areas at the nanoscale, provides three new experimental and complementary concepts that can enhance the knowledge of nucleation pathways on iridium. First, SEM imaging at low-acceleration voltage enables the detection of diamond nuclei or stable precursors after the BEN step. Second, domains consist of iridium furrows that are covered by an amorphous carbon overlayer, with a thickness of 6.8 nm, according to AFM and X-ray photoemission spectroscopy data. Third, SEM observations also suggest a close relationship between furrows created under ion bombardment and domains in our study conditions. These results prompted us to propose a scheme that describes the topography and surface chemistry of domains.
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N. Vaissiere, S. Saada, M. Bouttemy, A. Etcheberry, P. Bergonzo, et al.. Heteroepitaxial diamond on iridium: New insights on domain formation. Diamond and Related Materials, Elsevier, 2013, 36, pp.16 - 25. ⟨10.1016/j.diamond.2013.03.010⟩. ⟨cea-01846952⟩



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