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Reliability of nanocrystalline diamond MEMS capacitive switches

Abstract : A solution to mitigate the dielectric charging and to improve reliability of RF MEMS switches is the replacement of the commonly used dielectrics with others that allow fast draining of the injected charges. One of the materials that have been successfully incorporated is diamond. The present paper presents both the charging and discharging process characteristics in MEMS having nanocrystalline diamond dielectric films. The study is performed by monitoring the charging and discharging current transient in MIM capacitors and the shift of the bias for minimum up state capacitance before and after progressively increasing stressing time tests. The results reveal that diamond is very promising material to improve the device reliability.
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Submitted on : Thursday, July 19, 2018 - 3:58:01 PM
Last modification on : Friday, June 25, 2021 - 10:00:02 AM


  • HAL Id : cea-01844712, version 1



L. Michalas, S. Saada, M. Koutsoureli, C. Mer, A. Leuliet, et al.. Reliability of nanocrystalline diamond MEMS capacitive switches. 2013 European Microwave Integrated Circuit Conference, Oct 2013, Nuremberg, Germany. pp.364-367. ⟨cea-01844712⟩



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