Aperiodic multilayer mirrors for efficient broadband reflection in the extreme ultraviolet

Y. Ménesguen 1 S. Rossi 2 E. Meltchakov 3 F. Delmotte 3
1 LNHB - Laboratoire National Henri Becquerel
DM2I - Département Métrologie Instrumentation & Information : DRT/LIST/DM2I
2 Management, entrepreneuriat, innovation
CERAG - Centre d'études et de recherches appliquées à la gestion
3 Laboratoire Charles Fabry / Optique XUV
LCF - Laboratoire Charles Fabry
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https://hal-cea.archives-ouvertes.fr/cea-01833254
Contributor : Yves Ménesguen <>
Submitted on : Monday, July 9, 2018 - 2:56:31 PM
Last modification on : Wednesday, September 4, 2019 - 1:40:15 PM

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Y. Ménesguen, S. Rossi, E. Meltchakov, F. Delmotte. Aperiodic multilayer mirrors for efficient broadband reflection in the extreme ultraviolet. Applied physics. A, Materials science & processing, Springer Verlag, 2010, 98 (2), pp.305 - 309. ⟨10.1007/s00339-009-5400-2⟩. ⟨cea-01833254⟩

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