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Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging

Abstract : CEA-Leti has developed a monolithic large focal plane array bolometric technology optimized for 2D real-time imaging in the terahertz range. Each pixel consists in a silicon microbolometer coupled to specific antennas and a resonant quarter-wavelength cavity. First prototypes of imaging arrays have been designed and manufactured for optimized sensing in the 1-3.5THz range where THz quantum cascade lasers are delivering high optical power. NEP in the order of 1 pW/sqrt(Hz) has been assessed at 2.5 THz. This paper reports the steps of this development, starting from the pixel level, to an array associated monolithically to its CMOS ROIC and finally a stand-alone camera. For each step, modeling, technological prototyping and experimental characterizations are presented.
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https://hal-cea.archives-ouvertes.fr/cea-01823919
Contributor : Léna Le Roy <>
Submitted on : Tuesday, June 26, 2018 - 3:46:54 PM
Last modification on : Thursday, June 11, 2020 - 5:04:07 PM

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CEA | DRT | LETI | LIST | CEA-GRE | DM2I

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F. Simoens, J. Meilhan, S. Gidon, G. Lasfargues, J. Lalanne Dera, et al.. Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging. Proc. SPIE 8846, Terahertz Emitters, Receivers, and Applications IV, Aug 2013, San Diego, CA, United States. pp.88460O, ⟨10.1117/12.2024861⟩. ⟨cea-01823919⟩

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