Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging - Archive ouverte HAL Access content directly
Conference Papers Year : 2013

Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging

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Abstract

CEA-Leti has developed a monolithic large focal plane array bolometric technology optimized for 2D real-time imaging in the terahertz range. Each pixel consists in a silicon microbolometer coupled to specific antennas and a resonant quarter-wavelength cavity. First prototypes of imaging arrays have been designed and manufactured for optimized sensing in the 1-3.5THz range where THz quantum cascade lasers are delivering high optical power. NEP in the order of 1 pW/sqrt(Hz) has been assessed at 2.5 THz. This paper reports the steps of this development, starting from the pixel level, to an array associated monolithically to its CMOS ROIC and finally a stand-alone camera. For each step, modeling, technological prototyping and experimental characterizations are presented.
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Dates and versions

cea-01823919 , version 1 (24-01-2023)

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Cite

François Simoens, J. Meilhan, S. Gidon, G. Lasfargues, J. Lalanne Dera, et al.. Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging. Terahertz Emitters, Receivers, and Applications IV, SPIE, Aug 2013, San Diego, CA, United States. pp.88460O, ⟨10.1117/12.2024861⟩. ⟨cea-01823919⟩
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