CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL

Y. Ménesguen (1) , B. Boyer (1) , H. Rotella (2) , J. Lubeck (3) , J. Weser (3) , B. Beckhoff (3) , D. Grötzsch (4) , B. Kanngiesser (4) , A. Novikova (1) , E. Nolot (2) , M.-C. Lépy (1)

1 LNHB - Laboratoire National Henri Becquerel
2 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
3 PTB - Physikalisch-Technische Bundesanstalt [Berlin]
4 Institut fur Atomare Physik und Fachdidaktik, TU Berlin

A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X-ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflection X-ray fluorescence-related techniques such as grazing incidence XRF. The instrument was successfully installed and operated on the two branches of the metrology beamline making possible experiments over a wide range of photon energies (45 eV to 40 keV). A heating sample holder was developed to allow the sample temperature to be controlled up to 300° C. Some examples of the first studies are given to illustrate the capabilities of the setup

Keywords: REFLECTIVITY; SOLEIL synchrotron; Characterization of thin films; metrology; X-RAY-FLUORESCENCE

Domains: Physics [physics]; Physics [physics]; Instrumentation and Detectors [physics.ins-det]; Physics [physics]; Nuclear Experiment [nucl-ex]; Physics [physics]; Physics [physics]; Atomic Physics [physics.atom-ph]; Engineering Sciences [physics]; Optics / Photonic

Y. Ménesguen, B. Boyer, H. Rotella, J. Lubeck, J. Weser, et al.. CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL. X-Ray Spectrometry, 2017, 46 (5), pp.303-308. ⟨10.1002/xrs.2742⟩. ⟨cea-01801603⟩