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Journal Articles X-Ray Spectrometry Year : 2017

CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL

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Abstract

A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X-ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflection X-ray fluorescence-related techniques such as grazing incidence XRF. The instrument was successfully installed and operated on the two branches of the metrology beamline making possible experiments over a wide range of photon energies (45 eV to 40 keV). A heating sample holder was developed to allow the sample temperature to be controlled up to 300° C. Some examples of the first studies are given to illustrate the capabilities of the setup

Dates and versions

cea-01801603 , version 1 (28-05-2018)

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Y. Ménesguen, B. Boyer, H. Rotella, J. Lubeck, J. Weser, et al.. CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL. X-Ray Spectrometry, 2017, 46 (5), pp.303-308. ⟨10.1002/xrs.2742⟩. ⟨cea-01801603⟩
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