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CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL

Abstract : A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X-ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflection X-ray fluorescence-related techniques such as grazing incidence XRF. The instrument was successfully installed and operated on the two branches of the metrology beamline making possible experiments over a wide range of photon energies (45 eV to 40 keV). A heating sample holder was developed to allow the sample temperature to be controlled up to 300° C. Some examples of the first studies are given to illustrate the capabilities of the setup
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https://hal-cea.archives-ouvertes.fr/cea-01801603
Contributor : Léna Le Roy <>
Submitted on : Monday, May 28, 2018 - 3:32:22 PM
Last modification on : Thursday, June 11, 2020 - 5:04:07 PM

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Y. Ménesguen, B. Boyer, H. Rotella, J. Lubeck, J. Weser, et al.. CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL. X-Ray Spectrometry, Wiley, 2017, 46 (5), pp.303-308. ⟨10.1002/xrs.2742⟩. ⟨cea-01801603⟩

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