Maira Possas-Abreu, Farbod Ghassemi, Lionel Rousseau, Emmanuel Scorsone, Emilie Descours, et al.. Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection.
Sensors, MDPI, 2017, 17 (6), pp.1163.
⟨10.3390/s17061163⟩.
⟨cea-01792502⟩