Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection

Maira Possas-Abreu 1, * Farbod Ghassemi 1 Lionel Rousseau 1 Emmanuel Scorsone 2 Emilie Descours 3 Gaelle Lissorgues 1
* Corresponding author
1 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
2 LCD-LIST - Laboratoire Capteurs Diamant
DM2I - Département Métrologie Instrumentation & Information : DRT/LIST/DM2I
3 ISIPCA - Institut supérieur international du parfum, de la cosmétique et de l'aromatique alimentaire
Abstract : This paper reports on the development of an autonomous instrument based on an array of eight resonant microcantilevers for vapor detection. The fabricated sensors are label-free devices, allowing chemical and biological functionalization. In this work, sensors based on an array of silicon and synthetic diamond microcantilevers are sensitized with polymeric films for the detection of analytes. The main advantage of the proposed system is that sensors can be easily changed for another application or for cleaning since the developed gas cell presents removable electrical connections. We report the successful application of our electronic nose approach to detect 12 volatile organic compounds. Moreover, the response pattern of the cantilever arrays is interpreted via principal component analysis (PCA) techniques in order to identify samples.
Keywords : ASTHMA THIN-FILMS PERFORMANCE TRANSDUCERS DISCRIMINATION CANTILEVERS microcantilevers electronic nose VOC discrimination gas sensors sensor arrays synthetic diamond
Document type :
Journal articles
Complete list of metadatas

Cited literature [35 references]  Display  Hide  Download
https://hal-cea.archives-ouvertes.fr/cea-01792502
Contributor : Léna Le Roy <>
Submitted on : Tuesday, May 15, 2018 - 3:17:43 PM
Last modification on : Wednesday, September 4, 2019 - 1:40:15 PM

File

sensors-17-01163.pdf
Publisher files allowed on an open archive

Identifiers

Collections

CEA | LIST | UNIV-PARIS-SACLAY | CEA-UPSAY | DRT | CNAM | UPEC-UPEM | ESYCOM | ESIEE-PARIS | UNIV-HESAM | DM2I

Citation

Maira Possas-Abreu, Farbod Ghassemi, Lionel Rousseau, Emmanuel Scorsone, Emilie Descours, et al.. Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection. Sensors, MDPI, 2017, 17 (6), pp.1163. ⟨10.3390/s17061163⟩. ⟨cea-01792502⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

292

Files downloads

416

Contact

CCSD