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Journal articles
Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection
Abstract : This paper reports on the development of an autonomous instrument based on an array of eight resonant microcantilevers for vapor detection. The fabricated sensors are label-free devices, allowing chemical and biological functionalization. In this work, sensors based on an array of silicon and synthetic diamond microcantilevers are sensitized with polymeric films for the detection of analytes. The main advantage of the proposed system is that sensors can be easily changed for another application or for cleaning since the developed gas cell presents removable electrical connections. We report the successful application of our electronic nose approach to detect 12 volatile organic compounds. Moreover, the response pattern of the cantilever arrays is interpreted via principal component analysis (PCA) techniques in order to identify samples.
Keywords :
VOC discrimination
volatile organic compounds
electronic nose
resonant sensors
resonant microcantilevers
microcantilevers
diamond
synthetic diamond microcantilevers
DISCRIMINATION
TRANSDUCERS
ASTHMA
THIN-FILMS
PERFORMANCE
synthetic diamond
Principal component analysis PCA
gas sensors
sensor arrays
compound detection
Cited literature [35 references]
https://hal-cea.archives-ouvertes.fr/cea-01792502
Contributor : Léna Le Roy <>
Submitted on : Tuesday, May 15, 2018 - 3:17:43 PM
Last modification on : Saturday, May 1, 2021 - 3:49:48 AM
Contributor : Léna Le Roy <>
Submitted on : Tuesday, May 15, 2018 - 3:17:43 PM
Last modification on : Saturday, May 1, 2021 - 3:49:48 AM
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sensors-17-01163.pdf
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