Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection

Maira Possas-Abreu (1) , Farbod Ghassemi (2, 1) , Lionel Rousseau (2, 1) , Emmanuel Scorsone (3) , Emilie Descours (4) , Gaelle Bazin Lissorgues (1)

1 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
2 ESIEE Paris
3 LCD-LIST - Laboratoire Capteurs Diamant
4 ISIPCA - Institut supérieur international du parfum, de la cosmétique et de l'aromatique alimentaire

This paper reports on the development of an autonomous instrument based on an array of eight resonant microcantilevers for vapor detection. The fabricated sensors are label-free devices, allowing chemical and biological functionalization. In this work, sensors based on an array of silicon and synthetic diamond microcantilevers are sensitized with polymeric films for the detection of analytes. The main advantage of the proposed system is that sensors can be easily changed for another application or for cleaning since the developed gas cell presents removable electrical connections. We report the successful application of our electronic nose approach to detect 12 volatile organic compounds. Moreover, the response pattern of the cantilever arrays is interpreted via principal component analysis (PCA) techniques in order to identify samples.

Keywords: THIN-FILMS; PERFORMANCE; gas sensors; sensor arrays; compound detection; VOC discrimination; electronic nose; resonant sensors; synthetic diamond; resonant microcantilevers; Principal component analysis PCA; microcantilevers; volatile organic compounds; ASTHMA; diamond; synthetic diamond microcantilevers; DISCRIMINATION; TRANSDUCERS

Domains: Physics [physics]; Physics [physics]; Instrumentation and Detectors [physics.ins-det]; Chemical Sciences; Analytical chemistry; Physics [physics]; Physics [physics]; Data Analysis, Statistics and Probability [physics.data-an]; Engineering Sciences [physics]; Electromagnetism; Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics; Engineering Sciences [physics]; Materials; Life Sciences [q-bio]; Bioengineering; Biomaterials

Maira Possas-Abreu, Farbod Ghassemi, Lionel Rousseau, Emmanuel Scorsone, Emilie Descours, et al.. Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection. Sensors, 2017, 17 (6), pp.1163. ⟨10.3390/s17061163⟩. ⟨cea-01792502⟩