Laser-processed three dimensional graphitic electrodes for diamond radiation detectors

Benoît Caylar (1) , Michal Pomorski (1) , Philippe Bergonzo (1)

1 LCD-LIST - Laboratoire Capteurs Diamant

We have used an original approach for diamond detectors where three dimensional buried graphitic electrodes are processed in the bulk of a diamond substrate via laser-induced graphitization. Prototype made of polycrystalline chemical vapor deposition diamond was fabricated using a nanosecond UV laser. Its charge collection efficiency was evaluated using a-particles emitted by a 241-Americium source. An improved charge collection efficiency was measured proving that laser micro-machining of diamond is a valid option for the future fabrication of three dimensional diamond detectors

Keywords: polycrystalline chemical vapor deposition diamond; diamond detector; three dimensional detector; 3D electrode; diamond substrate; laser-induced graphitization; laser micro-machining; charge collection efficiency

Domains: Micro and nanotechnologies/Microelectronics; Materials Science [cond-mat.mtrl-sci]; Instrumentation and Detectors [physics.ins-det]

Benoît Caylar, Michal Pomorski, Philippe Bergonzo. Laser-processed three dimensional graphitic electrodes for diamond radiation detectors. Applied Physics Letters, 2013, 103, pp.043504. ⟨10.1063/1.4816328⟩. ⟨cea-01791926⟩