Applications of an energy-dispersive pnCCD for X-ray reflectivity: Investigation of interdiffusion in Fe-Pt multilayers, physica status solidi (a), vol.101, issue.6, pp.2601-2607, 2011. ,
DOI : 10.1007/978-3-540-71679-2
A motionless X-ray reflectometer for air/liquid interfaces based on Naudon's design: example of application, Supramolecular Science, vol.4, issue.3-4, pp.191-194, 1997. ,
DOI : 10.1016/S0968-5677(97)00004-7
Elements of Modern X-ray Physics, 2010. ,
Selected Synchrotron Radiation Techniques The Netherlands, Encyclopedia of Nanotechnology, vol.19, pp.2322-2344, 2012. ,
Surface composition of BaTiO3/SrTiO3(001) films grown by atomic oxygen plasma assisted molecular beam epitaxy, Journal of Applied Physics, vol.61, issue.11, p.114116, 2012. ,
DOI : 10.1063/1.2828339
URL : https://hal.archives-ouvertes.fr/hal-01237473
Application of a hybrid pixel detector to powder diffraction, Journal of Synchrotron Radiation, vol.14, issue.1, pp.151-157, 2007. ,
DOI : 10.1107/S0909049506048783
A 20kpixels CdTe photon-counting imager using XPAD chip, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol.589, issue.2, pp.268-274, 2008. ,
DOI : 10.1016/j.nima.2008.02.042
URL : https://hal.archives-ouvertes.fr/in2p3-00260076
Energy dispersive x-ray reflectivity technique to study thermal properties of polymer films, Journal of Applied Physics, vol.78, issue.5, pp.2882-2887, 2003. ,
DOI : 10.1351/pac200274091491
Challenges of nickel silicidation in CMOS technologies, Microelectronic Engineering, vol.137, pp.79-87, 2015. ,
DOI : 10.1016/j.mee.2014.12.013
A study of X-ray reflectivity data analysis methods for thin film thickness determination, Powder Diffraction, vol.11, issue.02, pp.114-116, 1996. ,
DOI : 10.1017/S0885715600009076
Photon Science 2013 ? Highlights and Annual Report, pp.102-103, 2013. ,
Imaging of strain and lattice orientation by quick scanning X-ray microscopy combined with three-dimensional reciprocal space mapping, Journal of Applied Crystallography, vol.33, issue.2, pp.762-769, 2014. ,
DOI : 10.1107/S0021889899014375
High-resolution x-ray scattering measurements: I. Surfaces, Reports on Progress in Physics, vol.63, issue.10, pp.1725-1777, 2000. ,
DOI : 10.1088/0034-4885/63/10/203
X-ray and Neutron Reflectivity, 2009. ,
DOI : 10.1007/978-3-540-88588-7
XPAD: A photons counting pixel detector for material sciences and small-animal imaging, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol.572, issue.1, pp.250-253, 2007. ,
DOI : 10.1016/j.nima.2006.10.315
URL : https://hal.archives-ouvertes.fr/in2p3-00114589
In situ study of the growth kinetics and interfacial roughness during the first stages of nickel???silicide formation, Microelectronic Engineering, vol.83, issue.11-12, pp.2253-2257, 2006. ,
DOI : 10.1016/j.mee.2006.10.014
On the use of CCD area detectors for high-resolution specular X-ray reflectivity, Journal of Synchrotron Radiation, vol.13, issue.4, pp.293-303, 2006. ,
DOI : 10.1107/S0909049506018000
Observation of subnanometre-high surface topography with X-ray reflection phase-contrast microscopy, Nature Physics, vol.63, issue.10, pp.700-704, 2006. ,
DOI : 10.1016/S0016-7037(99)00225-2
electric field using a large-area hybrid pixel XPAD detector, Journal of Applied Crystallography, vol.650, issue.4, pp.1151-1161, 2013. ,
DOI : 10.1016/j.nima.2010.12.114
URL : https://hal.archives-ouvertes.fr/hal-00903674
In situ combined synchrotron X-ray diffraction and wafer curvature measurements during formation of thin palladium silicide film on Si(001) and Si (111), Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, vol.284, pp.74-77, 2012. ,
DOI : 10.1016/j.nimb.2011.07.019
Influence of surface roughness on near-surface depth analysis from X-ray reflectivity measurements, Surface and Interface Analysis, vol.51, issue.10-11, pp.1642-1645, 2010. ,
DOI : 10.1103/PhysRevB.51.5297
Powder Diffr, pp.100-104, 2013. ,
High Resolution X-ray Scattering from Thin Films and Multilayers, J. Vac. Sci. Technol. A, pp.31-021505, 1999. ,
Nickel silicide encroachment formation and characterization, Microelectronic Engineering, vol.87, issue.3, pp.245-248, 2010. ,
DOI : 10.1016/j.mee.2009.06.003
Ni- and Co-based silicides for advanced CMOS applications, Microelectronic Engineering, vol.70, issue.2-4, pp.158-165, 2003. ,
DOI : 10.1016/S0167-9317(03)00370-8
Exact determination of the phase in timeresolved X-ray reflectometry, Optics Express, vol.16, issue.1, pp.144-149, 2008. ,
DOI : 10.1364/OE.16.000144
Full-field X-ray reflection microscopy of epitaxial thin-films, Journal of Synchrotron Radiation, vol.21, issue.10, pp.1252-1261, 2014. ,
DOI : 10.1016/S0262-8856(03)00137-9
Towards implementation of a nickel silicide process for CMOS technologies, Microelectronic Engineering, vol.70, issue.2-4, pp.144-157, 2003. ,
DOI : 10.1016/S0167-9317(03)00380-0
Magnetic ratchet for three-dimensional spintronic memory and logic, Nature, vol.96, issue.7434, pp.647-650, 2013. ,
DOI : 10.1063/1.3441402
: a program for grazing-incidence small-angle X-ray scattering analysis of supported islands, Journal of Applied Crystallography, vol.35, issue.4, pp.406-421, 2002. ,
DOI : 10.1107/S0021889802006088
Synchrotron X-ray diffraction experiments with a prototype hybrid pixel detector, Journal of Applied Crystallography, vol.650, issue.1, pp.38-47, 2012. ,
DOI : 10.1016/j.nima.2010.12.114
URL : https://hal.archives-ouvertes.fr/hal-01203672
Detective quantum efficiency, modulation transfer function and energy resolution comparison between CdTe and silicon sensors bump-bonded to??XPAD3S, Journal of Synchrotron Radiation, vol.17, issue.4, pp.486-495, 2010. ,
DOI : 10.1107/S0909049510013257
Energy resolution of the CdTe-XPAD detector: calibration and potential for Laue diffraction measurements on protein crystals, Journal of Synchrotron Radiation, vol.45, issue.3, pp.323-331, 2012. ,
DOI : 10.1143/JJAP.45.8842
Novel versatile X-ray reflectometer for angle and energy dispersive characterization of liquid and solid surfaces and interfaces, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol.350, issue.1-2, pp.398-405, 1994. ,
DOI : 10.1016/0168-9002(94)91188-6
Fast pole figure acquisition using area detectors at the DiffAbs beamline ??? Synchrotron SOLEIL, Journal of Applied Crystallography, vol.108, issue.6, pp.1842-1853, 2013. ,
DOI : 10.1107/S0021889813027453/rw5043sup4.avi
URL : https://hal.archives-ouvertes.fr/cea-01377306
Beyond the ensemble average: X-ray microdiffraction analysis of single SiGe islands, Physical Review B, vol.63, issue.24, p.245425, 2008. ,
DOI : 10.1063/1.2929374
A novel X-ray diffractometer for studies of liquid???liquid interfaces, Journal of Synchrotron Radiation, vol.167, issue.62, pp.45-56, 2014. ,
DOI : 10.1140/epjst/e2009-00943-6
The Influence of Surface Roughness on X-Ray Total Reflection Spectra, Japanese Journal of Applied Physics, vol.17, issue.S2, pp.329-331, 1978. ,
DOI : 10.7567/JJAPS.17S2.329
New apparatus for grazing X-ray reflectometry in the angle-resolved dispersive mode, Journal of Applied Crystallography, vol.22, issue.5, pp.460-464, 1989. ,
DOI : 10.1107/S0021889889005819
X-ray Reflectometer for the Diagnostics of Thin Films During Growth, Journal of Applied Crystallography, vol.30, issue.6, pp.905-908, 1997. ,
DOI : 10.1107/S0021889897002483
On the geometry of a modern imaging diffractometer, Acta Crystallographica Section A Foundations of Crystallography, vol.55, issue.3, pp.543-557, 1999. ,
DOI : 10.1107/S0108767398015037
Geometric distortion corrections for fiber-optic tapers in X-ray charge-coupled-device detectors, Journal of Applied Crystallography, vol.32, issue.1, pp.11-14, 1999. ,
DOI : 10.1107/S0021889898005172
XPAD3-S: A fast hybrid pixel readout chip for X-ray synchrotron facilities, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol.591, issue.1, pp.159-162, 2008. ,
DOI : 10.1016/j.nima.2008.03.047
URL : https://hal.archives-ouvertes.fr/in2p3-00266598
XPAD3: A new photon counting chip for X-ray CT-scanner, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol.571, issue.1-2, pp.321-324, 2007. ,
DOI : 10.1016/j.nima.2006.10.092
URL : https://hal.archives-ouvertes.fr/in2p3-00114034
Surface Studies of Solids by Total Reflection of X-Rays, Physical Review, vol.8, issue.2, pp.359-369, 1954. ,
DOI : 10.1039/df9500800314
Real-time X-ray reflectometry during thin-film processing, physica status solidi (a), vol.62, issue.8, pp.2785-2791, 2007. ,
DOI : 10.1002/pssa.200675665
First silicide formed by reaction of Ni(13%Pt) films with Si(100): Nature and kinetics by in-situ X-ray reflectivity and diffraction, Scripta Materialia, vol.63, issue.1, pp.24-27, 2010. ,
DOI : 10.1016/j.scriptamat.2010.02.040
Probing surface and interface morphology with Grazing Incidence Small Angle X-Ray Scattering, Surface Science Reports, vol.64, issue.8, pp.255-380, 2009. ,
DOI : 10.1016/j.surfrep.2009.07.002
URL : https://hal.archives-ouvertes.fr/hal-01442842
Thin Solid Films, pp.100-104, 2013. ,
X-ray Spectrometry: Recent Technological Advances, 2004. ,
Acta Cryst, pp.418-425, 2005. ,
X-ray and neutron scattering from rough surfaces, Physical Review B, vol.57, issue.4, pp.2297-2311, 1988. ,
DOI : 10.1103/PhysRevLett.57.1279
Two-dimensional resonant magnetic soft X-ray scattering set-up for extreme sample environment, Journal of Synchrotron Radiation, vol.40, issue.1, pp.181-189, 2013. ,
DOI : 10.1107/S0021889807044482
URL : https://hal.archives-ouvertes.fr/cea-01444153
X-ray server (TER-sl, TRDS_sl), http:// sergey.gmca.aps.anl.gov/ [last accessed, p.9, 2017. ,
Review on grazing incidence X-ray spectrometry and reflectometry, Spectrochimica Acta Part B: Atomic Spectroscopy, vol.54, issue.1, pp.41-82, 1999. ,
DOI : 10.1016/S0584-8547(98)00160-8
Powder Diffr, pp.105-111, 2013. ,
X-ray Scattering from Soft Matter Thin Films Tracts in Modern Physics, Materials Science and Basic Research, vol.148, 1999. ,
Integrated Intensities Using a Six-Circle Surface X-ray Diffractometer, Journal of Applied Crystallography, vol.30, issue.5, pp.532-543, 1997. ,
DOI : 10.1107/S0021889897002537
URL : http://journals.iucr.org/j/issues/1997/05/01/gl0493/gl0493.pdf
Diffuse scattering of hard x rays from rough surfaces, Physical Review B, vol.45, issue.12, pp.7953-7956, 1992. ,
DOI : 10.1103/PhysRevB.45.602
On the intersection of grating truncation rods with the Ewald sphere studied by grazing-incidence small-angle X-ray scattering, Journal of Applied Crystallography, vol.40, issue.6, pp.1050-1055, 2007. ,
DOI : 10.1107/S0021889807044482
Fast X-ray reflectivity measurements using an area detector 213 ,
DOI : 10.1107/s1600577517015703