Subsurface damage distribution characterization of ground surfaces using Abbott–Firestone curves

Abstract : Measurement of subsurface damage (SSD) induced by grinding process is of major interest in the development of high laser damage fused silica optical components manufacturing processes. Most SSD measurements methods give only access to the peak to peak value. We herein report on the benefit of using Abbott–Firestone curves to get an insight of the SSD distribution inside the optical material. We evidence on various diamond wheel ground fused silica substrates that such an approach is complementary to a classical SSD peak to peak measurement and bring useful information to optimize a grinding process.
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Article dans une revue
Optics Express, Optical Society of America, 2012, 20, pp.13551 - 13559. 〈10.1364/OE.20.013551〉
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https://hal-cea.archives-ouvertes.fr/cea-01623566
Contributeur : Jerome Neauport <>
Soumis le : mercredi 25 octobre 2017 - 14:25:23
Dernière modification le : jeudi 26 juillet 2018 - 11:42:01
Document(s) archivé(s) le : vendredi 26 janvier 2018 - 14:01:53

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CEA | INRA

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Raynald Laheurte, Philippe Darnis, Nathalie Darbois, Olivier Cahuc, Jérôme Neauport. Subsurface damage distribution characterization of ground surfaces using Abbott–Firestone curves. Optics Express, Optical Society of America, 2012, 20, pp.13551 - 13559. 〈10.1364/OE.20.013551〉. 〈cea-01623566〉

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