Subsurface damage distribution characterization of ground surfaces using Abbott–Firestone curves

Raynald Laheurte; Philippe Darnis; Nathalie Darbois; Olivier Cahuc; Jérôme Neauport

Subsurface damage distribution characterization of ground surfaces using Abbott–Firestone curves

Raynald Laheurte ^{1, *} Philippe Darnis ¹ Nathalie Darbois ² Olivier Cahuc ¹ Jérôme Neauport ²

* Corresponding author

1 I2M - Institut de Mécanique et d'Ingénierie de Bordeaux

2 CEA-CESTA - Commissariat à l'Energie Atomique et aux Energies Alternatives

Abstract : Measurement of subsurface damage (SSD) induced by grinding process is of major interest in the development of high laser damage fused silica optical components manufacturing processes. Most SSD measurements methods give only access to the peak to peak value. We herein report on the benefit of using Abbott–Firestone curves to get an insight of the SSD distribution inside the optical material. We evidence on various diamond wheel ground fused silica substrates that such an approach is complementary to a classical SSD peak to peak measurement and bring useful information to optimize a grinding process.

Document type :

Journal articles

Domain :

Physics [physics] / Physics [physics] / Optics [physics.optics]

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https://hal-cea.archives-ouvertes.fr/cea-01623566
Contributor : Jerome Neauport <>
Submitted on : Wednesday, October 25, 2017 - 2:25:23 PM
Last modification on : Friday, February 22, 2019 - 1:28:11 AM
Long-term archiving on : Friday, January 26, 2018 - 2:01:53 PM

oe-20-12-13551.pdf

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