Influence of subsurface cracks on laser induced surface damage, Proc. SPIE, p.264, 2003. ,
Progress in the understanding of fracture related laser damage of fused silica, Laser-Induced Damage in Optical Materials: 2007, p.672003, 2007. ,
DOI : 10.1117/12.752830
Fracture-induced subbandgap absorption as a precursor to optical damage on fused silica surfaces, Optics Letters, vol.35, issue.16, pp.35-2702, 2010. ,
DOI : 10.1364/OL.35.002702
??????????????????trailing indent??????????????????????????????, Science China Physics, Mechanics & Astronomy, vol.61, issue.16, pp.1-6, 2015. ,
DOI : 10.1017/CBO9780511623127
Combined advanced finishing and UV-laser conditioning for producing UV-damage-resistant fused silica optics, Proc. SPIE 4679, pp.56-68, 2002. ,
DOI : 10.1364/oft.2002.omb4
Magnetorheological finishing for removing surface and subsurface defects of fused silica optics, Optical Engineering, vol.53, issue.9, p.92010, 2014. ,
DOI : 10.1117/1.OE.53.9.092010
The effect of HF/NH4F etching on the morphology of surface fractures on fused silica, Journal of Non-Crystalline Solids, vol.355, issue.13, pp.797-810, 2009. ,
DOI : 10.1016/j.jnoncrysol.2009.01.037
Effects of wet etch processing on laser-induced damage of fused silica surfaces, Proc. SPIE, pp.446-455, 1998. ,
HF-Based Etching Processes for Improving Laser Damage Resistance of Fused Silica Optical Surfaces, Journal of the American Ceramic Society, vol.13, issue.[3], pp.416-428, 2011. ,
DOI : 10.1038/39827
Improve the laser damage resistance of fused silica by wet surface cleaning and optimized HF etch process, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers, p.87860, 2013. ,
DOI : 10.1117/12.2020734
Improving UV laser damage threshold of fused silica optics by wet chemical etching technique, Proc. SPIE 9532, p.953221, 2015. ,
Reaction of Glasses with Hydrofluoric Acid Solution, Journal of the American Ceramic Society, vol.58, issue.7, pp.360-362, 1982. ,
DOI : 10.1021/j150577a023
Wet chemical etching of silicate glasses in hydrofluoric acid based solutions, Journal of Materials Science, vol.234, issue.5, pp.6261-6273, 1993. ,
DOI : 10.1117/12.961449
Etching Mechanism of Vitreous Silicon Dioxide in HF-Based Solutions, Journal of the American Chemical Society, vol.122, issue.18, pp.4345-4351, 2000. ,
DOI : 10.1021/ja993803z
Diffusion behavior of ammonium group and its interaction mechanisms with intrinsic defects in fused silica, Applied Physics A, vol.106, issue.3A, p.7, 2016. ,
DOI : 10.1103/PhysRevLett.106.206402
Examination of etching agent and etching mechanism on femtosecond laser microfabrication of channels inside vitreous silica substrates, J. Phys. Chem, vol.113, pp.11560-11566, 2009. ,
Loose abrasive slurries for optical glass lapping, Applied Optics, vol.49, issue.30, pp.5736-5745, 2010. ,
DOI : 10.1364/AO.49.005736
URL : https://hal.archives-ouvertes.fr/cea-01217069
Procédé de polissage d'au moins une surface d'un pièce à base de silicium, 2001. ,
Procédé pour améliorer la tenue au flux laser d'un composant optique, 2016. ,
Higher certainty of the laser-induced damage threshold test with a redistributing data treatment, Review of Scientific Instruments, vol.86, issue.10, p.103106, 2015. ,
DOI : 10.1021/j100374a068
Producing fused silica optics with high UVdamage resistance to nanosecond pulsed lasers, Proc. SPIE 9532, p.95320, 2015. ,
DOI : 10.1117/12.2185898
Characterization of the Polishing-Induced Contamination of Fused Silica Optics, Journal of the American Ceramic Society, vol.94, issue.2, p.14448, 2016. ,
DOI : 10.1111/j.1551-2916.2010.04112.x
The effect of deep HF etching on the surface quality and figure of fused silica optics, Proc. SPIE 9575, p.95750, 2015. ,