In situ cleaning/passivation of surfaces for contact technology on III-V materials

Philippe Rodriguez 1 Laura Toselli 1 Elodie Ghegin 2, 1 Fabrice Nemouchi 1 Névine Rochat 1 Eugenie Martinez 1
1 CEA-LETI - Laboratoire d'Electronique et des Technologies de l'Information
2 ST-CROLLES - STMicroelectronics [Crolles]
Abstract : In this work we introduce the use of physical plasmas (e.g. Ar-and He-based plasmas) in order to study the in situ cleaning (prior to metal deposition) of InGaAs layers dedicated to the realisation of self-aligned contacts. For the characterisation of cleaning efficiency, we performed surface analyses like X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy in attenuated total reflection mode. The first results described in this work are encouraging. We have found efficient processes for removing totally or partially III-V native oxides.
Type de document :
Communication dans un congrès
2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), May 2015, Grenoble, France. pp.107 - 110, 2015, 〈10.1109/IITC-MAM.2015.7325643〉
Liste complète des métadonnées

Littérature citée [8 références]  Voir  Masquer  Télécharger
https://hal-cea.archives-ouvertes.fr/cea-01615586
Contributeur : Philippe Rodriguez <>
Soumis le : jeudi 12 octobre 2017 - 15:52:40
Dernière modification le : lundi 24 septembre 2018 - 10:56:04

Fichier

Ph.Rodriguez.MAM2015.pdf
Fichiers produits par l'(les) auteur(s)

Identifiants

Collections

CEA | DRT | LETI

Citation

Philippe Rodriguez, Laura Toselli, Elodie Ghegin, Fabrice Nemouchi, Névine Rochat, et al.. In situ cleaning/passivation of surfaces for contact technology on III-V materials. 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), May 2015, Grenoble, France. pp.107 - 110, 2015, 〈10.1109/IITC-MAM.2015.7325643〉. 〈cea-01615586〉

Exporter

BibTeX TEI DC DCterms EndNote

Partager

Métriques

Consultations de la notice

42

Téléchargements de fichiers

55

Contact

support.ccsd.cnrs.fr
hal.support@ccsd.cnrs.fr
Logo CCSD