InGaAs Surface Pretreatment prior to Metal Solid-State Reactions for Low Resistance Contacts

Philippe Rodriguez (1) , L. Toselli (1) , E. Ghegin (2, 1) , N. Rochat (1) , N. Chevalier (1) , E. Martinez (1) , F. Nemouchi (1)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 ST-CROLLES - STMicroelectronics [Crolles]

Domains: Micro and nanotechnologies/Microelectronics

Philippe Rodriguez, L. Toselli, E. Ghegin, N. Rochat, N. Chevalier, et al.. InGaAs Surface Pretreatment prior to Metal Solid-State Reactions for Low Resistance Contacts. 15th International Workshop on Junction Technology (IWJT), Jun 2015, Kyoto, Japan. pp.54 - 57, ⟨10.1109/IWJT.2015.7467095⟩. ⟨cea-01615579⟩