InGaAs Surface Pretreatment prior to Metal Solid-State Reactions for Low Resistance Contacts

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Philippe Rodriguez, L. Toselli, E. Ghegin, N. Rochat, N. Chevalier, et al.. InGaAs Surface Pretreatment prior to Metal Solid-State Reactions for Low Resistance Contacts. 15th International Workshop on Junction Technology (IWJT), Jun 2015, Kyoto, Japan. pp.54 - 57, ⟨10.1109/IWJT.2015.7467095⟩. ⟨cea-01615579⟩

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