Operando hard X-ray photoelectron spectroscopy study of the Pt/Ru/PbZr$_{0.52}$Ti$_{0.48}$O$_3$ interface - Archive ouverte HAL Access content directly
Journal Articles Applied Physics Letters Year : 2017

Operando hard X-ray photoelectron spectroscopy study of the Pt/Ru/PbZr$_{0.52}$Ti$_{0.48}$O$_3$ interface

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Abstract

We have used hard X-ray photoelectron spectroscopy to probe the Pt/Ru/PbZr$_{0.52}$Ti${0.48}$O$_3$ (PZT) interface in a Pt/Ru/PZT(220 nm)/Pt/TiO$_2$/SiO$_2$/Si stack. A customized sample-holder allows in-situ photoemission analysis while applying bias to the capacitor. Hard X-rays probe the buried interface between the top electrode and the ferroelectric PZT. The use of operando conditions reveals a polarization-dependent electronic response, most probably due to imperfect screening of the depolarizing field. There is evidence for an additional core level component related to the electrode-PZT interface. Zr oxide nanostructures at the surface of the sol-gel layer may form a ferroelectric dead layer at the interface, affecting device performance.
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Dates and versions

cea-01591616 , version 1 (21-09-2017)

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Ibrahima Gueye, Gwenael Le Rhun, Olivier Renault, David Cooper, Denis Ceolin, et al.. Operando hard X-ray photoelectron spectroscopy study of the Pt/Ru/PbZr$_{0.52}$Ti$_{0.48}$O$_3$ interface. Applied Physics Letters, 2017, 111, pp.32906. ⟨10.1063/1.4993909⟩. ⟨cea-01591616⟩
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