Roadmap for 22 nm and beyond ,
DOI : 10.1109/ipfa.2009.5232710
Three dimensional reciprocal space measurement by x-ray diffraction using linear and area detectors: Applications to texture and defects determination in oriented thin films and nanoprecipitates, J. Vac. Sci. Technol., A, vol.31, p.21505, 2013. ,
An off-normal fibre-like texture in thin films on single-crystal substrates, Nature, vol.426, pp.641-645, 2003. ,
Self-aligned metal source/drain In x Ga 1-x As n-MOSFETs using Ni-InGaAs alloy, IEEE International Electron Devices Meeting (IEDM), pp.26-32, 2010. ,
In 0.7 Ga 0.3 As channel n-MOSFET with selfaligned Ni-InGaAs source and drain, Electrochem. Solid-State Lett, vol.14, pp.60-62, 2011. ,
Metallurgical study of Ni/GaAs contacts. II. Interfacial reactions of Ni thin films on (111) and (001) GaAs, Journal of Applied Physics, vol.241, issue.5, pp.2129-2136, 1989. ,
DOI : 10.1016/0040-6090(82)90093-1
Interfacial reactions between Ni films and GaAs, Journal of Applied Physics, vol.19, issue.3, pp.991-1001, 1986. ,
DOI : 10.1063/1.89039
films formed on InGaAs by annealing, Crystal structure and epitaxial relationship of Ni 4 InGaAs 2 films formed on InGaAs by annealing, p.12202, 2013. ,
DOI : 10.1116/1.4769266
As: Structural and chemical study, Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, vol.31, issue.3, p.31205, 2013. ,
DOI : 10.1116/1.4802917
Photoelectron spectroscopy study of band alignment at interface between Ni-InGaAs and In 0.53 Ga 0.47 As, Appl. Phys. Lett, vol.99, p.12105, 2011. ,
A Self-Aligned Ni-InGaAs Contact Technology for InGaAs Channel n-MOSFETs, Journal of The Electrochemical Society, vol.2008, issue.5, pp.511-515, 2012. ,
DOI : 10.1149/2.020201jes
Metastable phase formation during the reaction of Ni films with Si(001): The role of texture inheritance, Journal of Applied Physics, vol.107, issue.9, p.93515, 2010. ,
DOI : 10.1016/S0364-5916(03)00049-X
Fast pole figure acquisition using area detectors at the DiffAbs beamline ??? Synchrotron SOLEIL. Erratum, Journal of Applied Crystallography, vol.47, issue.1, p.482, 2014. ,
DOI : 10.1107/S1600576713032081
URL : https://hal.archives-ouvertes.fr/cea-01377306
{XPAD3} hybrid pixel detector applications, Radiation Imaging Detectors Proceedings of the 10th International Workshop on Radiation Imaging Detectors, pp.233-235, 2008. ,
URL : https://hal.archives-ouvertes.fr/in2p3-00379416
Full 3D reciprocal space map of thin polycrystalline films for microelectronic applications, 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), pp.53-56 ,
DOI : 10.1109/IITC-MAM.2015.7325624
Carine Crystallography 3.1 (DIVERGENT SA, Centre de Transfert, 1989. ,
for three-dimensional visualization of crystal, volumetric and morphology data, Journal of Applied Crystallography, vol.51, issue.6, pp.1272-1276, 2011. ,
DOI : 10.1107/S0108767394013292
Accurate miscut angle determination for spherically bent Bragg crystals, Review of Scientific Instruments, vol.223, issue.3, p.33102, 2008. ,
DOI : 10.1063/1.1867392
Superstructure Ordering of Intermetallics: B8 Structures in the Pseudo-Cubic Regime, Acta Crystallographica Section B Structural Science, vol.54, issue.2, pp.97-108, 1998. ,
DOI : 10.1107/S010876819701879X
Morphological and phase stability of nickel???germanosilicide on Si1???xGex under thermal stress, Journal of Applied Physics, vol.2000, issue.12, p.7193, 2002. ,
DOI : 10.1016/0022-5088(71)90108-1
Etude des interdiffusions en phase solide dans le contact Ni/AlAs, J. Phys. III, vol.5, pp.373-388, 1995. ,
URL : https://hal.archives-ouvertes.fr/jpa-00249317
Angles between planes in the hexagonal and tetragonal crystal systems, Micron (1969), vol.2, issue.1, pp.59-61, 1970. ,
DOI : 10.1016/0047-7206(70)90045-2
Size and orientation effects on the kinetics and structure of nickelide contacts to InGaAs fin structures, Nano Lett, vol.15, pp.3770-3779, 2015. ,
Comment on Phase equilibria of the Ga?Ni?As ternary system, J. Appl. Phys. J. Appl. Phys, vol.80, issue.82, p.493, 1996. ,
Diffusion-reaction: The ordered Cu 3 Au rule and its corollaries, Diffusion and Reactions: From Basics to Applications, Solid State Phenomena, pp.93-102, 1995. ,