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Conference papers
Characterization of Integrated Nano Materials
Abstract : Depending on the level of the technological developments, the characterization techniques are mature to
support them or still require protocol definition and relevance demonstration for the issues addressed. For Beyond
CMOS and Extreme CMOS devices, the integration of nano-objects like nanowires and carbon nanotubes, brings about
analysis requirements that are at the frontier of the state-of-the-art characterization techniques. The specific limitations
of the use of the existing physical and chemical characterization techniques for integrated nanomaterials are highlighted.
In the case of Scanning Probe Microscopy, in-situ localization and positioning are specifically challenging and data
analysis is mainly statistical. It is also shown how specific sample preparation may serve the extraction of the required
3D information in particular for Electron Microscopy. The measurement developments related to NEMS technologies
guided by the need for dynamic characterization of these components are covered too.
Cited literature [23 references]
https://hal-cea.archives-ouvertes.fr/cea-01549318
Contributor : Jean Christophe Gabriel <>
Submitted on : Wednesday, June 28, 2017 - 4:58:37 PM
Last modification on : Thursday, June 11, 2020 - 5:04:06 PM
Long-term archiving on: : Thursday, January 18, 2018 - 1:47:22 AM
Contributor : Jean Christophe Gabriel <>
Submitted on : Wednesday, June 28, 2017 - 4:58:37 PM
Last modification on : Thursday, June 11, 2020 - 5:04:06 PM
Long-term archiving on: : Thursday, January 18, 2018 - 1:47:22 AM
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