Characterization of Integrated Nano Materials

Amal Chabli (1, 2) , Peter Cherns (2, 1) , Chevalier Nicolas (2, 1) , David Cooper (2, 1) , Lafond Dominique (2, 1) , François Bertin (2, 1) , Henri Blanc (2, 1) , A. Brenac (2, 1) , Philippe Andreucci (2, 1) , Jean Christophe Gabriel (2, 1)

1 Minatec Grenoble (CEA/ INP Grenoble)
2 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

Depending on the level of the technological developments, the characterization techniques are mature to support them or still require protocol definition and relevance demonstration for the issues addressed. For Beyond CMOS and Extreme CMOS devices, the integration of nano-objects like nanowires and carbon nanotubes, brings about analysis requirements that are at the frontier of the state-of-the-art characterization techniques. The specific limitations of the use of the existing physical and chemical characterization techniques for integrated nanomaterials are highlighted. In the case of Scanning Probe Microscopy, in-situ localization and positioning are specifically challenging and data analysis is mainly statistical. It is also shown how specific sample preparation may serve the extraction of the required 3D information in particular for Electron Microscopy. The measurement developments related to NEMS technologies guided by the need for dynamic characterization of these components are covered too.

Keywords: 3D characterization; Microscopy; Tomography; Dynamic properties; Nanowires NWs; Nanotubes; Nanoneedle

Domains: Engineering Sciences [physics]; Chemical Sciences

Amal Chabli, Peter Cherns, Chevalier Nicolas, David Cooper, Lafond Dominique, et al.. Characterization of Integrated Nano Materials. 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, May 2009, Albany, New York, United States. pp.12-20, ⟨10.1063/1.3251207⟩. ⟨cea-01549318⟩