Direct graphene growth on transitional metal with solid carbon source and its converting into graphene/transitional metal oxide heterostructure

Jeongho Park 1, * Tyson Back 2 Steven Fairchild 1 William Mitchel 1 Said Elhamri 2 John Boeckl 1 Dominique Martinotti 3 Ludovic Douillard 3 Patrick Soukiassian 4, 5
* Auteur correspondant
3 LEPO - Laboratoire d'Electronique et nanoPhotonique Organique
SPEC - UMR3680 - Service de physique de l'état condensé, IRAMIS - Institut Rayonnement Matière de Saclay
5 LENSIS - Laboratoire d'Etude des NanoStructures et Imagerie de Surface
SPEC - UMR3680 - Service de physique de l'état condensé, IRAMIS - Institut Rayonnement Matière de Saclay
Abstract : The oxide/semiconductor structure is key to controlling current in electronic devices and HfO$_2$ is a common gate material in conventional electronic devices due to its favorable dielectric properties. Graphene devices also require insulating gates. We demonstrate a unique direct growth approach to obtain the bottom gate structure (graphene/HfO$_2$/n-SiC). The present approach involves transfer of graphene grown by chemical vapor deposition (CVD) on Cu to oxidized Si wafers, a complex process prone to low yield and reduced performance. Furthermore, HfO$_2$ is preferred to SiO$_2$ because of its superior properties. The proposed concept consists of the direct deposition of graphene by solid carbon molecular beam epitaxy on Hf metal coated n-type SiC, followed by oxygen intercalation to form HfO$_2$. The oxygen intercalation will then convert the underlying Hf into HfO$_2$ due to the strong affinity of Hf with oxygen. We identify the graphene/HfO 2 formation by Raman, X-ray photoelectron spectroscopy (XPS), Low energy electron diffraction (LEED), Low energy electron microscopy (LEEM) and electrical properties including Hall mobility and leakage current measurement.
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Carbon, Elsevier, 2017, 116, pp.303-309. 〈10.1016/j.carbon.2017.01.072〉
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Jeongho Park, Tyson Back, Steven Fairchild, William Mitchel, Said Elhamri, et al.. Direct graphene growth on transitional metal with solid carbon source and its converting into graphene/transitional metal oxide heterostructure. Carbon, Elsevier, 2017, 116, pp.303-309. 〈10.1016/j.carbon.2017.01.072〉. 〈cea-01520061〉

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