Chemistry and structure of BaTiO3 ultra-thin films grown by different O2 plasma power - Archive ouverte HAL Access content directly
Journal Articles Chemical Physics Letters Year : 2014

Chemistry and structure of BaTiO3 ultra-thin films grown by different O2 plasma power

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Abstract

We present a study of the chemical and atomic properties of 5 nm TiO2-terminated BaTiO3 (001) epitaxialfilms on Nb-doped SrTiO3, as a function of the atomic oxygen plasma power for film growth. Lowerplasma power produces non-stoichiometric films with oxygen vacancies and Ti3+ ions. The larger Ti3+ion radius and the in-plane clamping gives rise to an increase in the out-of-plane lattice parameter.XPS measures the Ti3+ concentration and the concomitant increase in dissociative water uptake in thefilm, giving rise to on-top OH adsorption on surface Ti, proton adsorption on surface oxygen, and a nearsurface Ba-OH environment.
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cea-01376789 , version 1 (05-10-2016)

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J.L. Wang, J. Leroy, G. Niu, G. Saint-Girons, B. Gautier, et al.. Chemistry and structure of BaTiO3 ultra-thin films grown by different O2 plasma power. Chemical Physics Letters, 2014, 592, pp.206 - 210. ⟨10.1016/j.cplett.2013.12.030⟩. ⟨cea-01376789⟩
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