Elastic Recoil Detection Analysis
Abstract
Among the family of Ion Beam Analysis techniques for material characterization, Elastic Recoil Detection Analysis (ERDA) exploits the spectroscopy of recoil nuclei moving under the impact of the ions of the beam. This technique is well suited to light elements profiling, especially for hydrogen measurements which can be performed with usual helium-4 beams available in most facilities. This chapter presents an overview of ERDA main features and focuses on a selection of recent papers dealing with hydrogen measurements in materials for miscellaneous applications, divided into four sections: metals, ceramics, minerals, and thin films.