Loose abrasive slurries for optical glass lapping

Jérôme Neauport (1) , Julie Destribats (1) , Cédric Maunier (1) , Chrystel Ambard (2) , Philippe Cormont (1) , B Pintault (2) , Olivier Rondeau (2)

1 CESTA - Centre d'études scientifiques et techniques d'Aquitaine
2 CEA Le Ripault - CEA Le Ripault

Loose abrasive lapping is widely used to prepare optical glass before its final polishing. We carried out a comparison of 20 different slurries from four different vendors. Slurry particle sizes and morphologies were measured. Fused silica samples were lapped with these different slurries on a single side polishing machine and characterized in terms of surface roughness and depth of subsurface damage (SSD). Effects of load, rotation speed, and slurry concentration during lapping on roughness, material removal rate, and SSD were investigated.

Domains: Physics [physics]; Physics [physics]; Optics [physics.optics]; Engineering Sciences [physics]; Optics / Photonic

Jérôme Neauport, Julie Destribats, Cédric Maunier, Chrystel Ambard, Philippe Cormont, et al.. Loose abrasive slurries for optical glass lapping. Journal of Optics A: Pure and Applied Optics, 2010, 49, pp.5736-5745. ⟨10.1364/AO.49.005736⟩. ⟨cea-01217069⟩