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In situ generation of indium catalysts to grow crystalline silicon nanowires at low temperature on ITO

Pierre-Jean Alet 1 Linwei Yu 2 Gilles Patriarche 3 Serge Palacin 1 Pere Roca I Cabarrocas 2
1 LCSI - Laboratoire de Chimie des Surfaces et Interfaces
2 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]
3 LPN - Laboratoire de photonique et de nanostructures
Abstract : In situ generation of indium catalyst droplets and subsequent growth of crystalline silicon nanowires on ITO by plasma-enhanced CVD are reported, and the wurtzite (Si-IV) phase is clearly evidenced in some wires
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Pierre-Jean Alet, Linwei Yu, Gilles Patriarche, Serge Palacin, Pere Roca I Cabarrocas. In situ generation of indium catalysts to grow crystalline silicon nanowires at low temperature on ITO. Journal of Materials Chemistry, Royal Society of Chemistry, 2008, 18, pp.5187-5189. ⟨10.1039/b813046a⟩. ⟨cea-01056562⟩

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