Using STED and ELSM confocal microscopy for a better knowledge of fused silica polished glass interface

Jerome Neauport 1 Rodolphe Catrin 1 Philippe Legros 2 Daniel Taroux 1 Thomas Corbineau 1 Philippe Cormont 1 Cédric Maunier 1
1 CESTA - Centre d'études scientifiques et techniques d'Aquitaine
2 PICIN - Plate-forme d'Imagerie Cellulaire, Institut François Magendie
Abstract : Characteristics and nature of close surface defects existing in fused silica polished optical surfaces were explored. Samples were deliberately scratched using a modified polishing process in presence of different fluorescent dyes. Various techniques including Epi-fluorescence Laser Scanning Mode (ELSM) or STimulated Emission Depletion (STED) confocal microscopy were used to measure and quantify scratches that are sometimes embedded under the polished layer. We show using a non-destructive technique that depth of the modified region extends far below the surface. Moreover cracks of 120 nm width can be present ten micrometers below the surface.
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Jerome Neauport, Rodolphe Catrin, Philippe Legros, Daniel Taroux, Thomas Corbineau, et al.. Using STED and ELSM confocal microscopy for a better knowledge of fused silica polished glass interface. Optics Express, Optical Society of America, 2013, 21 (24), pp.29769-29779. ⟨10.1364/OE.21.029769⟩. ⟨cea-01053348⟩

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