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Optimization of nanopores obtained by chemical etching on swift-ion irradiated lithium niobate

Abstract : The morphology of the nanopores obtained by chemical etching on ion-beam irradiated LiNbO3 has been investigated for a variety of ions (F, Br, Kr, Cu, Pb), energies (up to 2300 MeV), and stopping powers (up to 35 keV/nm) in the electronic energy loss regime. The role of etching time and etching agent on the pore morphology, diameter, depth, and shape has also been studied. The transversal and depth profiles of the pore have been found to be quite sensitive to both irradiation and etching parameters. Moreover, two etching regimes with different morphologies and etching rates have been identified.
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https://hal-cea.archives-ouvertes.fr/cea-00375877
Contributor : Chantal Brassy <>
Submitted on : Thursday, April 16, 2009 - 12:08:35 PM
Last modification on : Monday, May 25, 2020 - 6:02:04 PM

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  • HAL Id : cea-00375877, version 1

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M.L. Crespillo, M. Otto, A. Muñoz-Martín, J. Olivares, F. Agullo-Lopez, et al.. Optimization of nanopores obtained by chemical etching on swift-ion irradiated lithium niobate. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2009, 267, pp.1035-1038. ⟨cea-00375877⟩

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