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Properties of Ultra-Thin NbN Films for Membrane-Type THz HEB

Bruno Guillet 1 Ö. Arthursson 2 Laurence Méchin 1 M.-N. Metzner 3 Marie-Pierre Chauvat 3 Pierre Ruterana 3 V. Drakinskiy 2 S. Cherednichenko 2 R. Lefèvre 4 Y. Delorme 4 J.-M. Krieg 4 
1 Equipe Electronique - Laboratoire GREYC - UMR6072
GREYC - Groupe de Recherche en Informatique, Image et Instrumentation de Caen
2 MC2 - Department of Microtechnology and Nanoscience
3 CIMAP - UMR 6252 - Centre de recherche sur les Ions, les MAtériaux et la Photonique
4 LERMA - Laboratoire d'Etude du Rayonnement et de la Matière en Astrophysique
Abstract : Various buffer layers have been investigated in order to improve the crystalline quality of NbN ultra-thin films. The structural properties, the thickness, the surface morphology of 5-10 nm NbN films have been studied by different techniques. Uncertainty on thickness measurements in this range and the relation between NbN film quality and gain bandwidth are discussed in the framework of their use in Hot Electron Bolometers (HEB).
Keywords : NbN ultra-thin films Mixer devices
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Journal articles
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https://hal-cea.archives-ouvertes.fr/cea-00372235
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Submitted on : Tuesday, March 31, 2009 - 4:18:33 PM
Last modification on : Saturday, June 25, 2022 - 9:46:02 AM

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  • HAL Id : cea-00372235, version 1

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Citation

Bruno Guillet, Ö. Arthursson, Laurence Méchin, M.-N. Metzner, Marie-Pierre Chauvat, et al.. Properties of Ultra-Thin NbN Films for Membrane-Type THz HEB. J Low Temp Phys, 2008, 151, pp.570-574. ⟨cea-00372235⟩

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