Single swift heavy ion-induced trail of discontinuous nanostructures on SiO2 surface under grazing incidence

A.M.J.F. Carvalho (1) , Antoine Touboul (2) , M. Marinoni (1) , C. Guasch (1) , M. Ramonda (3) , Henning Lebius (4) , Frédéric Saigné (1) , J. Bonnet (1)

1 IES - Institut d’Electronique et des Systèmes
2 RADIAC - Radiations et composants
3 LMCP - Laboratoire de Microscopie en Champ Proche
4 CIMAP - UMR 6252 - Centre de recherche sur les Ions, les MAtériaux et la Photonique

Some recent results concerning swift heavy ion irradiation of thin SiO2 layers on Si under normal incidence irradiation leading to the formation of nanodots at the interface between the SiO2 film and the Si substrate or at the SiO2 surface are summarized. Moreover, we report observation of discontinuous and elongated tracks at the SiO2 surface after grazing incidence irradiation of SiO2–Si structures with fast heavy ion. A characterization of these nanostructures by means of Atomic Force Microscopy (AFM) has been performed. The present results are of major importance with regard to the development of emerging nanoelectronic devices and systems.

Keywords: Silicon dioxide; Silicon; Heavy ion irradiation; Nanostructures; Electronic excitations; Atomic Force Microscopy; Tapping mode; Contact mode

Domains: Physics [physics]; Condensed Matter [cond-mat]; Materials Science [cond-mat.mtrl-sci]

A.M.J.F. Carvalho, Antoine Touboul, M. Marinoni, C. Guasch, M. Ramonda, et al.. Single swift heavy ion-induced trail of discontinuous nanostructures on SiO2 surface under grazing incidence. Thin Solid Films, 2008, 517, pp.289-292. ⟨10.1016/j.tsf.2008.08.148⟩. ⟨cea-00343808⟩