N. Abelé, R. Fritschi, K. Boucart, F. Casset, P. Ancey et al., Suspended-gate MOSFET: bringing new MEMS functionality into solid-state MOS transistor, IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest., pp.479-481, 2005.
DOI : 10.1109/IEDM.2005.1609384

D. Grogg, D. Tsamados, N. D. Badila, and A. M. Ionescu, Integration of MOSFET detection in MEMS resonators for improved output detection, Proc. Transducers, pp.1709-1712, 2007.

S. Monfray, T. Skotnicki, Y. Morand, S. Descombes, M. Paoli et al., First 80 nm SON (Silicon-On-Nothing) MOSFETs with perfect morphology and high electrical performance, International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224), pp.2971-2974, 2001.
DOI : 10.1109/IEDM.2001.979591

C. Durand, F. Casset, B. Legrand, M. Faucher, P. Renaux et al., Characterization of IN-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, pp.13-17, 2008.
DOI : 10.1109/MEMSYS.2008.4443831
URL : https://hal.archives-ouvertes.fr/hal-00361112

C. T. Nguyen, Vibrating rf mems technology: fuel for an integrated micromechanical circuit revolution?, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., pp.243-246, 2005.
DOI : 10.1109/SENSOR.2005.1496402

C. Durand, F. Casset, P. Ancey, F. Judong, A. Talbot et al., Silicon on nothing MEMS electromechanical resonator, Proc. DTIP, pp.25-27, 2007.
DOI : 10.1007/s00542-007-0485-z
URL : https://hal.archives-ouvertes.fr/hal-00257711

A. George, A. Jacques, and M. Legros, Low-cycle fatigue in silicon: comparison with fcc metals, Fatigue & Fracture of Engineering Materials and Structures, vol.73, issue.1, pp.41-56, 2007.
DOI : 10.1016/S0921-5093(00)00689-4