A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements

Thomas Schneider (1) , Dominique Leduc (1) , Cyril Lupi (1) , Julien Cardin (2) , Hartmut Gundel (1) , Christian Boisrobert (1)

1 IREENA - Institut de Recherche en Energie Electrique de Nantes Atlantique EA4642
2 CIMAP - UMR 6252 - Centre de recherche sur les Ions, les MAtériaux et la Photonique

We consider three layer optical waveguides and present a method to measure simultaneously the refractive index and the thickness of each layer with m-lines spectroscopy. We establish the three layer waveguide modal dispersion equations and describe a numerical method to solve these equations. The accuracy of the method is evaluated by numerical simulations with noisy data and experimentally demonstrated using a PZT thin film placed between two ZnO layers.

Domaines: Optique / photonique; Science des matériaux [cond-mat.mtrl-sci]; Optique [physics.optics]

Thomas Schneider, Dominique Leduc, Cyril Lupi, Julien Cardin, Hartmut Gundel, et al.. A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements. Journal of Applied Physics, 2008, 103 (6), pp.063110-063110-7. ⟨10.1063/1.2885147⟩. ⟨hal-00996032⟩