Multiply-charged ion nanobeams

Amine Cassimi (1) , Tomoko Muranaka (1) , Laurent Maunoury (1) , Henning Lebius (1) , Bruno Manil (1) , Bernd A. Huber (1) , T. Ikeda (2) , Y. Kanai (2) , T.M. Kojima (2) , Y. Iwai (2) , T. Kambara (2) , Y. Yamazaki (2) , T. Nebiki , T. Narusawa

1 CIMAP - UMR 6252 - Centre de recherche sur les Ions, les MAtériaux et la Photonique
2 Atomic Physics Laboratory

Due to the strong evolution in the field of nanotechnologies and the continuous miniaturisation of electronic components, multiply-charged ion nanobeams would be a promising tool in this field of research. Either for surface modification or local (nanometer scale) surface analysis purposes, studying the feasibility of such beams is of strong interest. In the present contribution, we present a focusing technique based on the self-organised charge-up of a simple glass ‘funnel'.

Keywords: multiply charged ions; tapered glass tubes; nanobeams; patterning; surface analysis; charge exchange

Domains: Instrumentation and Detectors [physics.ins-det]

Amine Cassimi, Tomoko Muranaka, Laurent Maunoury, Henning Lebius, Bruno Manil, et al.. Multiply-charged ion nanobeams. International Journal of Nanotechnology, 2008, 5 (6/7/8), pp.809-817. ⟨cea-00273895⟩