Young modulus and Poisson ratio of PZT thin film by Picosecond Ultrasonics

F. Casset (1) , A. Devos (2, 3) , S. Sadtler , A. Le Louarn (4) , P. Emery (5) , G. Le Rhun , P. Ancey (6) , S. Fanget (1) , E. Defay (1)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 CHRU Lille - Centre Hospitalier Régional Universitaire [Lille]
3 Université de Lille
4 MENAPIC
5 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
6 Electronics Laboratory (LEG)

Thin-film sol-gel Pb(Zr 0.52 , Ti 0.48 )O 3 (PZT) can be used in many actuator applications thanks to its high piezoelectric coefficients. The accurate knowledge of its mechanical properties such as Young modulus (E) and Poisson ratio (ν ν) or stiffness matrix is a key point for predictive design, whereas the state of the art reports E PZT ranging from 70 to 139GPa. Those parameters can be accurately characterized by Picosecond Ultrasonics (PU) as detailed in this paper.

Keywords: Picosecond Ultrasonics; Young modulus; Poisson ratio; PZT

Domains: Micro and nanotechnologies/Microelectronics

F. Casset, A. Devos, S. Sadtler, A. Le Louarn, P. Emery, et al.. Young modulus and Poisson ratio of PZT thin film by Picosecond Ultrasonics. 2012 IEEE International Ultrasonics Symposium, Oct 2012, Dresden, Germany. pp.2180-2183, ⟨10.1109/ULTSYM.2012.0544⟩. ⟨hal-04038567⟩