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Gate spacers etching of Si$_3$N$_4$ using cyclic approach for 3D CMOS devices

 Valentin Bacquie , Aurelien Tavernier , Francois Boulard , Olivier Pollet , Nicolas Posseme
Journal of Vacuum Science & Technology A, 2021, 39, pp.033005. ⟨10.1116/6.0000871⟩
Article dans une revue cea-03343549v1
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The importance of sample preparation in time-of-flight secondary ion mass spectrometry analysis for semiconductor applications

 Jean-Paul Barnes , Claire Guyot , Pierre Hirchenhahn , Tony Maindron , Olivier Renault , et al.
SISS-22 -The Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions, Jun 2023, Kanazawa, Japan
Communication dans un congrès cea-04170890v1

Die-Scale Nanotopography Characterization: New Insight

 Viorel Balan , Yorrick Exbrayat , Sebastien Mermoz
International Conference on Planarization Technology (ICPT 2022), Sep 2022, Potsdam, United States
Communication dans un congrès cea-04349990v1
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Development of intentional contamination in iron by bath for silicon wafers and evaluation of VPD-Bulk and LPD-Bulk for metallic contaminants analyses by ICPMS

 Viviane Yim , Delphine Truffier-Boutry , Anna Mukhtarov , Anouk Galtayries
Solid State Phenomena, 2023, 346, pp.210-215. ⟨10.4028/p-UfkQd2⟩
Article dans une revue cea-04492799v1
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Wide bandgap material transfer as a flagship technology for future high power devices

 Julie Widiez , Guillaume Gelineau , Cédric Masante , Jérémie Chretien , Alexandre Moulin , et al.
2023 MRS Fall - 2023 MRS Fall Meeting and Exhibit, Nov 2023, Boston, United States
Communication dans un congrès cea-04409019v1
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Die-to-die alignment for lithographic processing of reconstructed wafers

 Mikhail Loktev , Sylvain Misat , Ralph Schiedon , Jeroen de Boeij , Michiel van der Stam , et al.
2022 Smart Systems Integration (SSI), IEEE, Apr 2022, Grenoble, France. ⟨10.1109/SSI56489.2022.9901421⟩
Communication dans un congrès cea-03956462v1
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Electrical induced cracking of PZT films and its effect on electrical properties of piezoelectric capacitors

 Hugo Kuentz , Baba Wague , Nicolas Vaxelaire , Valérie Demange , Christophe Poulain , et al.
ISAF 2022 - 2022 IEEE International Symposium on Applications of Ferroelectrics, Jun 2022, Tours, France
Communication dans un congrès cea-04539848v1

3D sequential integration: applications and associated key enabling modules (design & technology)

 P. Batude , O. Billoint , S. Thuries , P. Malinge , C. Fenouillet-Beranger , et al.
2021 IEEE International Electron Devices Meeting (IEDM), Dec 2021, San Francisco, France. pp.3.2.1-3.2.4, ⟨10.1109/IEDM19574.2021.9720671⟩
Communication dans un congrès cea-04456122v1
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Ge–Sb–S–Se–Te amorphous chalcogenide thin films towards on-chip nonlinear photonic devices

 J.-B. Dory , C. Castro-Chavarria , A. Verdy , J.-B. Jager , M. Bernard , et al.
Scientific Reports, 2020, 10, pp.11894. ⟨10.1038/s41598-020-67377-9⟩
Article dans une revue cea-02903381v1
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De l'utilisation de matrices en ToF-SIMS tandem MS pour la caractérisation d'OLEDs

 Pierre Hirchenhahn , Claire Guyot , Tony Maindron , Benoit Gilquin , Greg Fisher , et al.
1ères journées du GDR-MSI (First days of the MSI GDR), CNRS, Jun 2022, Bordeaux, France
Communication dans un congrès cea-03836345v1

The Photonic Atom Probe as a Tool for the Analysis of the Effect of Defects on the Luminescence of Nitride Quantum Structures

 Ioanna Dimkou , Jonathan Houard , Névine Rochat , Pradip Dalapati , Enrico Di Russo , et al.
Microscopy and Microanalysis, 2023, ⟨10.1093/micmic/ozac051⟩
Article dans une revue hal-03938973v1
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From polymer/metal hybrid materials' interface analysis to ToF-SIMS tandem MS measurement optimization.

 Pierre Hirchenhahn , Adham Al-Sayyad , Julien Bardon , Peter Plapper , Laurent Houssiau , et al.
RCP 2021 - Rencontres de Chimie-Physique 2021, Sep 2021, Sète, France
Communication dans un congrès cea-03616000v1

High-Q silica microcavities on a chip: From microtoroid to microsphere

 Jean-Baptiste Jager , Vincent Calvo , Eric Delamadeleine , Emmanuel Hadji , Pierre Noé , et al.
Applied Physics Letters, 2011, ⟨10.1063/1.3658389⟩
Article dans une revue cea-01989341v1

Elaboration and characterization of a 200 mm stretchable and flexible ultra-thin semi-conductor film

 Laurent Michaud , Clément Castan , Marc Zussy , Pierre Montméat , Vincent H Mareau , et al.
Nanotechnology, 2020, 31 (14), pp.145302. ⟨10.1088/1361-6528/ab647a⟩
Article dans une revue cea-02534522v1
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Large improvement of CNT yarn electrical conductivity by varying chemical doping and annealing treatment

 Yoann Dini , Denis Rouchon , Jérôme Faure-Vincent , Jean Dijon
Carbon, 2020, 156, pp.38-48. ⟨10.1016/j.carbon.2019.09.022⟩
Article dans une revue hal-03196862v1
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Correlative analysis using time-of-flight secondary ion mass spectrometry for beam sensitive samples

 Jean-Paul Barnes , Claire Guyot , Pierre Hirchenhahn , Amanda Gomes de Carvalho , Nicolas Gauthier , et al.
AVS69 - 69th International Symposium & Exhibition, Nov 2023, Portland, United States
Communication dans un congrès cea-04349703v1

Spin-orbit control of antiferromagnetic domains without a Zeeman coupling

 Damaris Tartarotti Maimone , Junying Shen , Nicolas Gauthier , Daniel Mazzone , Markus Zolliker , et al.
2023
Pré-publication, Document de travail hal-04364236v1

Impact of Hydrogen on Graphene-based Materials: Atomistic Modeling and Simulation of HRSTEM Images

 Cyril Guedj , Léonard Jaillet , François Rousse , Stephane Redon
AVS 65th International Symposium & Exhibition, Oct 2018, Long Beach, United States
Communication dans un congrès hal-01973651v1
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Caractérisation de structures GaN par HAXPES pour l'électronique de puissance

 Tarek Spelta , Eugénie Martinez , Marc Veillerot , Pedro Fernandes Paes Pinto Rocha , Sarah Boubenia , et al.
JNSPE 2022 - Journées Nationales des Spectroscopies de PhotoEmission, May 2022, Dijon, France
Communication dans un congrès cea-04325037v1
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High-energy photoelectron spectroscopy of Si(100) with Cr Kα excitation

 Pierre-Marie Deleuze , Kateryna Artyushkova , Eugénie Martinez , Olivier Renault
Surface Science Spectra, 2022, 29 (1), pp.014005. ⟨10.1116/6.0001511⟩
Article dans une revue cea-03564239v1
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Shape and roughness extraction of line gratings by small angle X-ray scattering : statistics and simulations

 Jérôme Reche , Patrice Gergaud , Yoann Blancquaert , Maxime Besacier , Guillaume Freychet
IEEE Transactions on Semiconductor Manufacturing, 2022, 35 (3), pp.425 - 431. ⟨10.1109/TSM.2022.3176026⟩
Article dans une revue cea-04249757v1
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Lab-scale Hard X-ray Photoelectron Spectroscopy for the analysis of buried interfaces in device technologies

 Pierre-Marie Deleuze , Eugénie Martinez , Kateryna Artyushkova , Olivier Renault
HAXPES 2022 - The 9th International Conference on Hard X-ray Photoelectron Spectroscopy, May 2022, Himeji, Japan
Communication dans un congrès cea-04325036v1
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Grain to grain heterogenities in PbZrTiO$_3$ thin film as probed by in-situ biasing XRD

 Kien Nguyen , Stephen Leake , Patrice Gergaud , Nicolas Vaxelaire
E-MRS Spring Meeting 2022, May 2022, Strasbourg, France
Communication dans un congrès cea-04327461v1
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Microelectronic applications of in-situ FIB sectioning in the TOF-SIMS

 Jean-Paul Barnes , Gregory L. Fisher
SIMS Europe 2023, Sep 2023, Nottingham, United Kingdom
Communication dans un congrès cea-04349704v1

Understanding of a new approach for silicon nitride spacer etching using gaseous hydrofluoric acid after hydrogen ion implantation

 Vincent Ah-Leung , Olivier Pollet , Nicolas Posseme , Maxime Garcia Barros , Névine Rochat , et al.
Journal of Vacuum Science & Technology A, 2017, 35 (2), pp.021408. ⟨10.1116/1.4977077⟩
Article dans une revue cea-02202455v1
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New directions in the analysis of buried interfaces for device technology by hard X-ray photoemission

 Olivier Renault , Pierre-Marie Deleuze , Jules Courtin , Rose Taylor Bure , Nicolas Gauthier , et al.
Faraday Discussions, In press, 2022, ⟨10.1039/D1FD00110H⟩
Article dans une revue cea-03607502v1
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Determination of free carrier concentration of polar semiconductors using LOPC modes: an example of InP

 Van-Hoan Le , Emmanuel Nolot , Carla Crobu , Christelle Navone
RamanFest 2022 - The 9th International Conference on Advanced Applied Raman Spectroscopy, Sep 2022, Paris, France
Communication dans un congrès cea-04196709v1
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High-energy photoelectron spectroscopy of Si3N4 thin film on Si with Cr Kα excitation

 Pierre-Marie Deleuze , Kateryna Artyushkova , Eugénie Martinez , Olivier Renault
Surface Science Spectra, 2022, 29 (1), pp.014007. ⟨10.1116/6.0001513⟩
Article dans une revue cea-03564235v1
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HAXPES reference spectra of bulk Mo and MoSe$_2$ with Cr $K_\alpha$ excitation

 Pierre-Marie Deleuze , Nicolas Gauthier , Kateryna Artyushkova , Eugénie Martinez , Olivier Renault
Surface Science Spectra, 2024, 31, pp.014006. ⟨10.1116/6.0003120⟩
Article dans une revue cea-04513201v1
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Biaxial piezoelectric MEMS mirrors with low absorption coating for 1550 nm long-range LIDAR

 Laurent Mollard , Jordi Riu , Santiago Royo , Christel Dieppedale , Antoine Hamelin , et al.
Micromachines, 2023, 14 (5), pp.1019. ⟨10.3390/mi14051019⟩
Article dans une revue cea-04552097v1
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