In situ generation of indium catalysts to grow crystalline silicon nanowires at low temperature on ITO

Pierre-Jean Alet (1) , Linwei Yu (2) , Gilles Patriarche (3) , Serge Palacin (1) , Pere Roca I Cabarrocas (2)

1 LCSI - Laboratoire de Chimie des Surfaces et Interfaces
2 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]
3 LPN - Laboratoire de photonique et de nanostructures

In situ generation of indium catalyst droplets and subsequent growth of crystalline silicon nanowires on ITO by plasma-enhanced CVD are reported, and the wurtzite (Si-IV) phase is clearly evidenced in some wires

Domaines: Matériaux

Pierre-Jean Alet, Linwei Yu, Gilles Patriarche, Serge Palacin, Pere Roca I Cabarrocas. In situ generation of indium catalysts to grow crystalline silicon nanowires at low temperature on ITO. Journal of Materials Chemistry, 2008, 18, pp.5187-5189. ⟨10.1039/b813046a⟩. ⟨cea-01056562⟩